| 000 | 00597nam a2200217Ia 4500 | ||
|---|---|---|---|
| 008 | 140710s9999 xx 000 0 und d | ||
| 020 | _a9781420055160 | ||
| 072 | _aNanotechnology | ||
| 082 | _a620.5 | ||
| 082 | _bM266 | ||
| 100 | _aMadou, J. Marc | ||
| 245 | _aFundamentals of Microfabrication and Nanotechnology: Manufacturing Techniques and Applications, Vol III | ||
| 245 | _cMadou, J. Marc | ||
| 250 | _a3rd ed. | ||
| 260 | _aNew York | ||
| 260 | _bCRC Press | ||
| 260 | _c2012 | ||
| 300 | _a623 | ||
| 300 | _fIllustration,index,reference,charts,graph & tables | ||
| 942 | _cBK | ||
| 999 |
_c2659 _d2659 |
||