Madou, J. Marc <br/><br/>
Fundamentals of Microfabrication and Nanotechnology: Manufacturing Techniques and Applications, Vol III 
Madou, J. Marc 
 - 3rd ed. 
 - New York  CRC Press  2012 
 - 623  Illustration,index,reference,charts,graph & tables 
<br/><br/><label>ISBN: </label>9781420055160 
<br/><br/><label>Dewey Class. No.: </label>620.5  / M266